Clean room knowledge

First, the definition of clean room
  
Clean Room , also known as clean room or clean room.
It refers to the removal of pollutants in the air, harmful air, bacteria, etc. in a certain space, and controls the temperature, cleanliness, indoor pressure, airflow velocity and airflow distribution, noise vibration and illumination, and static electricity in the room. Within a demand range, the room is specially designed. That is to say, no matter how the external air conditions change, the interior can have the characteristics of maintaining the cleanliness, temperature, humidity and pressure required by the original requirements.

Second, the role of clean room

  
The primary role is to control the clean room zui products (such as silicon chips, etc.) and temperature on the day the cleanliness of the atmosphere in contact, so that products can be produced in a good environment of space, manufacturing.
Third, clean room control project


1. It can remove the dust particles floating in the air.

2. It can prevent the generation of dust particles.

3. Temperature and humidity control.

4. Adjustment of pressure.

5. Exclusion of harmful gases.
6. The airtightness of the structure and the compartment.

7. Static prevention.

8. Electromagnetic interference prevention.


9. Consideration of safety factors.

10. Energy saving considerations.
Fourth, the classification of clean rooms

1. Turbulent Flow :


The air enters the clean room from the air-conditioning box through the air duct and the air filter (HEPA) in the clean room, and returns to the air from the partition wall panel or the raised floor on both sides of the clean room. The airflow moves in a non-linear motion and is in an irregular turbulent or eddy current state. This type is suitable for clean room grades of 1,000-100,000 .

Advantages: simple structure, system construction cost, and the expansion of the clean room is relatively easy. In some special-purpose places, the dust-free workbench can be used together to improve the clean room level.

Disadvantages: The dust particles caused by turbulent flow are difficult to discharge in the indoor space, which is easy to contaminate the process products. In addition, if the system is stopped and then activated, it will take a long time to reach the cleanliness of the demand.
2. Laminar :


The laminar air flow moves into a uniform linear shape. The air enters the room from a filter with a coverage of 100% , and is returned by the raised floor or the partition plates on both sides. This type is suitable for the environment where the clean room level needs to be higher. Use, generally its clean room grade is Class 1~100 . Its type can be divided into two types:

(1) Horizontal laminar flow type: The horizontal air is blown out from the filter in one direction, and the return air system of the opposite wall returns to the wind, and the dust is discharged to the outside with the wind direction, and the pollution on the downstream side is generally serious.

Advantages: The structure is simple and can be stabilized in a short time after operation.

Disadvantages: The construction cost is higher than the turbulent flow, and the indoor space is not easy to expand.

(2) Vertical laminar flow: the ceiling of the room is completely covered by ULPA filter, and the air is blown from top to bottom, which can obtain higher cleanliness. The dust generated by the staff during the process or the worker can be quickly discharged outside without affecting Other work areas.

Advantages: Easy management, stable operation in a short period of time, and difficult to be affected by the operation status or the operator.

Disadvantages: high construction cost, difficulty in flexible use of space, ceiling hangers occupy a considerable space, maintenance and replacement of filters is more troublesome.
3. The compound of formula (Mixed Type):


The composite type combines turbulent flow and laminar flow to provide a partially super clean air.

(1) Clean Tunnel : 100% coverage of the process area or work area with HEPA or ULPA filters to increase the cleanliness level to above 10 , saving installation and operation costs.
This type needs to isolate the operator's work area from product and machine maintenance to avoid work and quality during machine maintenance. ULSI processes mostly use this type.


The clean tunnel has two other advantages: A. Elastic expansion is easy; B. It can be easily performed in the maintenance area when repairing equipment.

(2) clean pipeline (Clean Tube): The product flow through the automatic production line surrounded and purification, the cleanliness level to provide 100 or more. Because the product and the operator and the dusting environment are isolated from each other, a small amount of air can be used to obtain good cleanliness, which can save energy, and no manual automatic production line is suitable for use. It is applicable to the pharmaceutical, food industry and semiconductor industries.

(3) Combined Clean Room : Clean the cleanliness level of the product process area of ​​the clean room with a clean room level of 10,000~100,000 to 10~1000 level for production; clean workbench, Clean work sheds and clean air cabinets are examples of this type.

Clean Workbench: Class Class 1~100 .

Clean work shed: a small space for anti-static transparent plastic cloth in the turbulent clean room space, using a separate HEPA or ULPA and air-conditioning blower group to become a higher-level clean space, the rating is 10 ~1000 grade, the height is about 2.5 meters, the coverage area is about 10m2 or less, and the four pillars are equipped with movable wheels, which can be used for elasticity.
Fifth, the composition of the clean room


The composition of the clean room is composed of the following systems ( indispensable in the constituent system molecules ) , otherwise it will not constitute a complete and good quality clean room:

(1) Ceiling system: including Ceiling rod , I-Beam or U-Beam , Ceiling grid or Ceiling frame .

(2) Air conditioning system: including air cabin, filter system, windmill, etc.

(3) Partitional wall : including windows and doors.

(4) Floor: including raised floor or anti-static Shumei floor.

(5) Lighting fixtures: including fluorescent lamps, yellow lamps, etc.

The main structure of the clean room is generally made of steel or bone cement, but whatever the structure, the following conditions must be met:
A. There will be no cracks due to temperature changes and vibrations;

B. It is not easy to produce dust particles, and it is difficult to adhere to particles;

C. low hygroscopicity;

D. In order to maintain indoor humidity conditions, thermal insulation is high;

Sixth, clean rooms are classified according to use (can be divided into two categories)

( 1 ), industrial clean room - the control of inanimate particles. It mainly controls the pollution of the working objects by air dust particles, and the inside generally maintains a positive pressure state. It is suitable for precision machinery industry, electronics industry (semiconductor, integrated circuit, etc.) aerospace industry, high purity chemical industry, atomic energy industry, optical magnetic products industry (disc, film, tape production) LCD (liquid crystal glass), computer hard disk, computer head Production and other industries.

( 2 ) Biological clean room, which mainly controls the pollution of working objects by living particles (bacteria) and inanimate particles (dust). Can be divided into:

A. General biological clean room, which mainly controls the pollution of microorganism (bacterial) objects. At the same time, its internal materials should be able to withstand various sterilizing agents, and the internal pressure is generally guaranteed. In essence, the internal materials should be able to withstand various industrial cleaning chambers. Examples: pharmaceutical industry, hospital (operating room, sterile ward) food, cosmetics, beverage production, animal laboratory, physical and chemical laboratory, blood station.

B. Biological safety clean room: It mainly controls the pollution of living particles from the working object to the outside world and people. The inside should maintain a negative pressure with the atmosphere. Example: bacteriology, biology, clean laboratory, physical engineering (recombinant genes, vaccine preparation)

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